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Electo-Damp® Active Vibration Isolation

Electro-Damp® is the first commercial active vibration cancellation system designed specifically to increase throughput, resolution, and yield in semiconductor manufacturing applications. It can be configured as individual modules, designed into a TMC-manufactured frame, or as part of a complex sub-system.





TMC designs and manufactures advanced building floor vibration isolation systems for nanotechnology. TMC isolators support ultra precision measurements, instruments, and manufacturing.


Electro-Damp® II


Electro-Damp® is the first commercial, active, vibration isolation system designed specifically to increase throughput, resolution, and yield in semiconductor manufacturing applications.


PEPS® II


PEPS® II is a digital non-contacting, height control system for TMC pneumatic vibration isolation systems..